000 00317nam a2200133Ia 4500
008 140317s9999 xx 000 0 und d
082 _a621.38153
100 _aNishizawa,J.
245 _aSemiconductor technologies.
260 _aTokyo
_bOHM
_c1984
300 _a13 391
653 _aSemiconductor
942 _2ddc
_cBK
999 _c10841
_d10841