000 00318nam a2200121Ia 4500
008 140317s9999 xx 000 0 und d
082 _a620.5
100 _aMadou, Marc J.
245 _aFundamental of microfabrication and nanotechnology. 3rd ed. Vol II
260 _aNY
_bCRC
_c2012
300 _a656
942 _2ddc
_cBK
999 _c16907
_d16907